Semiconductor Equipment

Laser Marking

GSI Lumonics SigmaClean

Marking Depth : 2.6 +/- 0.4

Dot Diameter : 70 +/- 10

Font : 5x9, 9x17, 10x18 (SEMI & IBM)

Single pulse 18 characters : 5x9

Thoughtput : 200 wafer/H